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Overview of all Brooks Instrument Thermal mass flowmeters

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There are 8 results.

Design Rating Min Max
Pressure Barg010
Pressure PSI0 150
Flow rate Air0 std ft³/hr106 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C550
Process media temp °F51122
Sizes
Imperial 1/4 inch
Applications
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Design Rating Min Max
Pressure Barg010
Pressure PSI0 150
Flow rate Air108 std ft³/hr636 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C550
Process media temp °F51122
Sizes
Imperial 1/2 inch
Applications
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Design Rating Min Max
Pressure Barg034
Pressure PSI0 500
Flow rate Air0 std ft³/hr636 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C1050
Process media temp °F50122
Sizes
Imperial 1/4 inch
Applications
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Design Rating Min Max
Pressure Barg06
Pressure PSI0 85
Flow rate Air0 std ft³/hr636 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C1050
Process media temp °F50122
Sizes
Imperial 1/4 inch
Applications
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Design Rating Min Max
Pressure Barg07
Pressure PSI0 100
Flow rate Air0 std ft³/hr636 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C1050
Process media temp °F50122
Sizes
Imperial 1/2 inch
Applications
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Design Rating Min Max
Pressure Barg06
Pressure PSI0 85
Flow rate Air0 std ft³/hr11 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C1050
Process media temp °F50122
Sizes
Imperial 1/4 inch
Applications
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications