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Brooks GF 135 series Thermal mass flowmeter

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Brooks Instrument Brooks GF 135 series Thermal mass flowmeter Thermal mass flowmeters

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Design Rating	Min	Max
Pressure Barg	0	6
Pressure PSI	0	85
Flow rate Air	0 std ft³/hr	11 std ft³/hr
Flow rate Water	0 Gal/hr
Process media temp °C	10	50
Process media temp °F	50	122

Sizes
Imperial	1/4 inch

Applications
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications