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Brooks GF 135 series Thermal mass flowmeter

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Design Rating Min Max
Pressure Barg06
Pressure PSI0 85
Flow rate Air0 std ft³/hr11 std ft³/hr
Flow rate Water0 Gal/hr
Process media temp °C1050
Process media temp °F50122
Imperial 1/4 inch
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications