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Brooks Instrument Brooks GF 135 series Thermal mass flowmeter Thermal mass flowmeters

Brooks Instrument Brooks GF 135 series Thermal mass flowmeter Thermal mass flowmeters also known as Mass Flow Meters or Mass flow Controllers are designed to meet the requirements of a wide range of industrial applications Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications. The key features of the Brooks Instrument Brooks GF 135 series Thermal mass flowmeter Thermal mass flowmeters are Fast Settling time, Corrosion resistant, High flow rate.

General info 
Brand Brooks Instrument
Design RatingMinMax
Process media temp °C 1050
Process media temp °F 50122
Pressure Barg 6
Pressure PSI 85
Flow rate air std ft³/hr 0.0111
Flow rate air nL/hr 0.18300
Specs 
Material of construction 304 Stainless Steel
Alloy C-22 (Hastelloy®)(UNS N06022)
Process Connection Type Vacuum, VCO, VCR, Vacuseal
Metal to Metal Face seal
Size 1/4 inch
Accuracy (+-% of span) 1
Seat material 316/316L Stainless Steel
Power supply 12 Volt DC
24 Volt DC
Signal output 4-20mA
0-10 Volt
Applications Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications
Industry Semiconductor industry