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Brooks Instrument Brooks GF 120 series Thermal mass flowmeter Thermal mass flowmeters also known as Mass Flow Meters or Mass flow Controllers are designed to meet the requirements of a wide range of industrial applications Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.. The key features of the Brooks Instrument Brooks GF 120 series Thermal mass flowmeter Thermal mass flowmeters are Fast Settling time, Corrosion resistant, High flow rate.
| General info | |
|---|---|
| Brand | Brooks Instrument |
| Design Rating | Min | Max |
|---|---|---|
| Process media temp °C | 10 | 50 |
| Process media temp °F | 50 | 122 |
| Pressure Barg | 34 | |
| Pressure PSI | 500 | |
| Flow rate air std ft³/hr | 0.01 | 636 |
| Flow rate air nL/hr | 0.18 | 18000 |
| Specs | |
|---|---|
| Material of construction | 316/316L Stainless Steel Alloy C-22 (Hastelloy®)(UNS N06022) |
| Process Connection Type | Vacuum, VCO, VCR, Vacuseal Metal to Metal Face seal |
| Size | 1/4 inch |
| Accuracy (+-% of span) | 1 |
| Seat material | 316/316L Stainless Steel |
| Power supply | 12 Volt DC 24 Volt DC |
| Signal output | 4-20mA 0-10 Volt |
| Certifications / standards | ATEX Intrinsic Safety certification |
| Applications | Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions. |
| Industry | Semiconductor industry |