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Brooks Instrument Brooks GF 120 series Thermal mass flowmeter Thermal mass flowmeters

Brooks Instrument Brooks GF 120 series Thermal mass flowmeter Thermal mass flowmeters also known as Mass Flow Meters or Mass flow Controllers are designed to meet the requirements of a wide range of industrial applications Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.. The key features of the Brooks Instrument Brooks GF 120 series Thermal mass flowmeter Thermal mass flowmeters are Fast Settling time, Corrosion resistant, High flow rate.

General info 
Brand Brooks Instrument
Design RatingMinMax
Process media temp °C 1050
Process media temp °F 50122
Pressure Barg 34
Pressure PSI 500
Flow rate air std ft³/hr 0.01636
Flow rate air nL/hr 0.1818000
Specs 
Material of construction 316/316L Stainless Steel
Alloy C-22 (Hastelloy®)(UNS N06022)
Process Connection Type Vacuum, VCO, VCR, Vacuseal
Metal to Metal Face seal
Size 1/4 inch
Accuracy (+-% of span) 1
Seat material 316/316L Stainless Steel
Power supply 12 Volt DC
24 Volt DC
Signal output 4-20mA
0-10 Volt
Certifications / standards ATEX Intrinsic Safety certification
Applications Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
Industry Semiconductor industry